Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas. 2000.
développeuse pour le photorésist sur tranche — plokštelės fotorezisto ryškintuvas statusas T sritis radioelektronika atitikmenys: angl. wafer photoresist developer vok. Waferentwickler, m rus. установка для проявления фоторезиста на пластине, f pranc. développeuse pour le photorésist sur… … Radioelektronikos terminų žodynas
Waferentwickler — plokštelės fotorezisto ryškintuvas statusas T sritis radioelektronika atitikmenys: angl. wafer photoresist developer vok. Waferentwickler, m rus. установка для проявления фоторезиста на пластине, f pranc. développeuse pour le photorésist sur… … Radioelektronikos terminų žodynas
plokštelės fotorezisto ryškintuvas — statusas T sritis radioelektronika atitikmenys: angl. wafer photoresist developer vok. Waferentwickler, m rus. установка для проявления фоторезиста на пластине, f pranc. développeuse pour le photorésist sur tranche, f … Radioelektronikos terminų žodynas
установка для проявления фоторезиста на пластине — plokštelės fotorezisto ryškintuvas statusas T sritis radioelektronika atitikmenys: angl. wafer photoresist developer vok. Waferentwickler, m rus. установка для проявления фоторезиста на пластине, f pranc. développeuse pour le photorésist sur… … Radioelektronikos terminų žodynas
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Stepper — A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Steppers are an essential part of the complex process, called photolithography, that creates… … Wikipedia
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Semiconductor device fabrication — Semiconductor manufacturing processes 10 µm 1971 3 µm 1975 1.5 µm 1982 … Wikipedia
Self-aligned gate — A self aligned gate is a design arrangement where a highly doped gate in a MOSFET is used as a mask for the doping of the source and drain around it. This technique ensures that the gate will always overlap the edges of the source and drain. The… … Wikipedia
Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of … Wikipedia
